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极大规模集成电路制造装备及成套
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极大规模集成电路制造装备及成套工艺实施
来源:互联网 作者:本站整理 日期:2009年03月30日 访问次数:

新华网北京3月27日电 (顾瑞珍、丁可宁)记者27日从科技部获悉,我国“极大规模集成电路制造装备及成套工艺”重大专项进入全面实施阶段。

据介绍,“极大规模集成电路制造装备及成套工艺”重大专项旨在开发集成电路关键制造装备,掌握具有自主知识产权的成套先进工艺及相关新材料技术,打破我国高端集成电路制造装备与工艺完全依赖进口的状况,带动相关产业的技术提升和结构调整。

重大专项是实现我国中长期科技发展规划的一项重要内容,党中央、国务院高度重视重大专项的实施工作,多次召开专门会议研究部署。为此,“极大规模集成电路制造装备及成套工艺”重大专项领导小组成立了专项咨询委员会、专项总体专家组和专项实施管理办公室等机构,规范了实施管理办法。

据了解,该重大专项面向全国广泛征集项目,经过严格的筛选及“三评两审”立项程序,目前拟启动54个项目,其中装备整机15项、成套工艺11项、关键材料9项、关键技术与零部件11项、前瞻性研究等8项,总投资180多亿元。

科技部部长万钢指出,启动“极大规模集成电路制造装备及成套工艺”重大专项是发挥科技支撑作用,促进经济平稳较快发展的重大行动,同时也是充分发挥科技的重要作用,体现“治本”要求的重要举措,对提高“扩内需、保增长”的科技含量,从根本上实现“调结构、上水平”的目标,推动我国经济尽快走上创新驱动的发展轨道,具有重要意义。

据介绍,该重大专项将陆续发布项目指南,以“公开、公平、公正”为原则,有序推进立项评审及实施管理工作。

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